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Outline
VR300DSE-2P is a full automatic type four-probe measurement System.
Thanks to our probe movement control systems, which is one of our core technologies, the System can measure a resistance and a sheet resistance of conductive samples such as silicon wafers, magnetic thin plates, etc. with a high degree of accuracy.
Features
Probe movement control mechanisms measure very thin films and very shallow ion implantation layers keeping high accuracy.
Optimum prove movement can be set up with recipes.
Further enhanced high-throughput realizes reduction of CoO.
Available for two load ports.
An automatic conditioning function for a probe tip is available.
It is possible to make images such as contour maps or 3D maps to show resistance distribution.
Operability is upgraded because of screens compatible with SEMI E95.
Compatible with automated systems for 300mm lines.
Application
Materials such as silicon, polysilicon, etc.
Ion implantation, diffusion, metal films, etc.
Related Contents
Contact
Contact form
Phone and Fax
- Kokusai Electric Semiconductor Service Inc.
- Sales Department, Applied Electronics Division
- Phone
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+81-42-512-7282
- Fax
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+81-42-512-7907