Full-Auto Type System for 300mm
VR300DH1

VR300DH1 is a full-auto type system for 300mm, and is the successor to VR300DSE.

This is a fully automatic four-probe measurement system that enables high-precision measurement of the resistivity and sheet resistance of conductive samples such as silicon wafers and magnetic thin plates using our core technology, the probe drive control system.

Probe drive control mechanism enables highly accurate measurement of ultra-thin films and ultra-shallow ion-implanted layers

Optimal probe drive can be set up by recipe

Reduction of CoO by increasing throughput

Supports 1 Load Port, Port is FOUP type

Equipped with an automatic conditioning function for probe needle tip (option)

Contour map of resistivity distribution, 3D map, etc. can be drawn

Improved operability with SEMI E95 compliant screen

Compatible with automation system for 300mm line (option)

Sheet resistance measurement after wafer thinning in the backside process of power devices (option)

Supports measurement range for low-resistance samples (option)

Materials related to silicon, polysilicon, etc.

Ion implantation, diffusion, metal film, etc.

Process evaluation after wafer thinning for power devices, etc.