01. Compactness

Same High-Precision Measurement.
40% Smaller Footprint.

• VR-CUBE is compact resistivity measurement system designed based on the
  VR300DH3 with an automated wafer handling system.
  While significantly reducing the footprint compared to conventional models, VR-CUBE maintains
  the high-precision measurement performance achieved through our core technologies.
• Utilizing the proven four-point prove method, VR-CUBE delivers stable and highly reproducible measurements.
  In addition, automated wafer handling and an optimized measurement process significantly improve throughput,
  enabling faster processing without compromising accuracy.

02. Versatility

Flexible Handling for Multiple Wafer Sizes

• VR-CUBE supports both 150mm and 200mm wafer handling on a single platform,
  providing greater flexibility for mixed-size production lines.
• A high-rigidity robotic arm, precision positioning control, and advanced soft-landing
  technology ensure safe, reliable, and high-speed wafer transfer. By accommodating
  multiple wafer sizes with a single system, VR-CUBE helps reduce equipment investment and
  minimize production line changeover time.

03. Next-Generation Technology

Supporting Power Semiconductor Development with SiC Measurement

• Leveraging our proprietary technology,
  VR-CUBE enables resistivity measurement of SiC wafers,
  which has traditionally been difficult to measure.
• The system supports a wide range of SiC applications, including bare wafers,
  Ion-implanted wafers, and metalized wafers, delivering highly accurate and reliable
  measurement results.

04. Sustainability

Sustainable Equipment Design

• VR-CUBE was designed not only to reduce installation space,
  but also to support a more sustainable manufacturing environment.
  Its compact design optimizes the number of components used,
  reducing overall system weight by approximately 30% compared with our conventional model
  while contributing to resource efficiency.
  In addition, power consumption is reduced by approximately 30% compared with equivalent products
  on the market.
  By combining lower resource consumption and improved energy efficiency,
  VR-CUBE helps minimize environmental impact while maintaining the
  high-precision measurement performance trusted by our customers.