High Band Ultrasonic Series
UO1200PMCX

High-frequency Ultrasonic Cleaning System

Product Image

High Band Ultrasonic Series

Use for cleaning of

  • Cleaning of semiconductor.

  • Cleaning of photomask.

  • Final cleaning of bare wafer.

  • Jig for semiconductor manufacture.

Highly precise output power control.

Because highly precise output feedback control at entire area of output setting range is performed, output stability in low output for miniaturisation of semiconductor is stabilized drastically. 

By this, the damage to the semiconductor device can reduce more.

Fixed frequency.

Ultrasonic transmissivity of quartz tank is always constant because the oscillating frequency is constant.

High efficiency and compact design.

A 15% reduce of power consumption was achieved from our conventional model by adoption of power factor corrector. The volume ratio reduced 30% from our conventional model, the mass reduced 30%, too.

UO1200PMCX Series

Model

UO1200PMCX

Oscillation mode

Single frequency

Rating output power

1200Watts

Output adjustment range

3 to 1200Watts

Frequency

730kHz

1MHz

Remort control

Possible

Power supply

Single phase AC200V~230V±10% 50/60Hz

Current consumption

10A

External dimensions (mm)

360(W)×150(H)×480(D)

Mass

14kg or less

Regulatory Approvals

CE・FCC *1・Semi-F47

*1

Noise filter [Model FB001 sold separately] is necessary for FCC conformity.

Contact

Contact form

Phone and Fax

Kokusai Electric Semiconductor Service Inc.
Sales Department, Applied Electronics Division
Phone

+81-42-512-7282

Fax

+81-42-512-7907