Product Image
Outline
VR250 is a manual four-point probe measuring instrument that achieves high-precision measurement of the resistivity and sheet resistance of conductive samples such as silicon wafers and thin magnetic plates.
Features
Wafer size: 75mm (three inches) ‐ 200mm
Very thin films and very shallow ion implantation layers can be measured keeping high accuracy.
Optimum prove movement can be set up with recipes.
It is possible to make images such as contour maps or 3D maps to show resistance distribution (optional).
A function for host communication is available.
Application
Materials such as silicon, polysilicon, etc.
Ion implantation, diffusion, metal films, etc.
Related Contents
Contact
Contact form
Phone and Fax
- Kokusai Electric Semiconductor Service Inc.
- Sales Department, Applied Electronics Division
- Phone
-
+81-42-512-7282
- Fax
-
+81-42-512-7907